Multifocal microlens arrays using multilayer photolithography
نویسندگان
چکیده
منابع مشابه
Reduction photolithography using microlens arrays: applications in gray scale photolithography.
This paper describes the application of reduction photolithography, using arrays of microlenses and gray scale masks, to generate arrays of micropatterns having multilevel and curved features in photoresist. This technique can fabricate, in a single exposure, three-dimensional microstructures (e.g., nonspherical microlens arrays) over areas of approximately 2 x 2 cm2. The simple optical configu...
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Endeavoring to push the boundaries of microfabrication with shrinkable polymers, we have developed a sequential shrink photolithography process. We demonstrate the utility of this approach by rapidly fabricating plastic microlens arrays. First, we create a mask out of the children's toy Shrinky Dinks by simply printing dots using a standard desktop printer. Upon retraction of this pre-stressed ...
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‡Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, NJ 07974, USA E-mail: [email protected] Microlenses are important optical components that image, detect, and couple light. But most synthetic microlenses have fixed position and shape once they are fabricated, so their possible range of tunability and complexity is rather limited. By comparison, biology provides many...
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We discuss a modified femtosecond pulse shaper that uses microlens arrays to convert the continuous band of frequencies normally obtained in the mask plane of a pulse shaper into a series of discrete spots. Our experiments demonstrate that this modification can improve pulse-shaping quality when modulator arrays with large interpixel gaps are used for Fourier-plane filtering.
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ژورنال
عنوان ژورنال: Optics Express
سال: 2020
ISSN: 1094-4087
DOI: 10.1364/oe.388921